Quantitative assessment of touch-screen panel by nondestructive inspection with three-dimensional real-time display optical coherence tomography

• We used optical coherence tomography (OCT) to inspect the cross sectional image and morphology of Touch-Screen Panel (TSP).
• We use of optical coherence tomography to measure several materials immersed in optical adhesives.
• This article is nondestructive inspection of normal and abnormal TSP samples were compared on the basis of our results.

We investigated the use of optical coherence tomography (OCT) to measure several materials immersed in optical adhesives. The effects of variations in the concentration, physical characteristics, and thickness of the materials were studied, and these parameters were found to significantly affect the OCT measurement. The materials were selected for their distinct spectral properties in the infrared region. To ensure reliability, we acquired images using a scanning electron microscope after performing the semiconductor production process. We verified the feasibility of the application of OCT for defect inspection and product verification of touch-screen panels.