کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
743285 894348 2009 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Plasma assisted thermal bonding for PMMA microfluidic chips with integrated metal microelectrodes
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی آنالیزی یا شیمی تجزیه
پیش نمایش صفحه اول مقاله
Plasma assisted thermal bonding for PMMA microfluidic chips with integrated metal microelectrodes
چکیده انگلیسی

Fracture of integrated metal microelectrodes likely happens during the thermal bonding process of PMMA [poly (methylmethacrylate)] microfluidic chips. In this paper, the fracture behaviors are studied. The fracture is mainly caused by the plastic deformation of the electrode plate (the PMMA plate with microelectrodes) and the thermal stress of microelectrodes, which is due to the high bonding temperature. To decrease the bonding temperature, a plasma assisted thermal bonding method is evaluated and first used to eliminate the fracture of microelectrodes. In this process, the surface of the cover plate (the PMMA plate with microchannels) is modified using oxygen plasma before the electrode plate is thermally bonded to the cover plate. The parameters of the oxygen plasma treatment are optimized, and the contact angle is decreased from 71.7° to 43.6°. The thermal bonding temperature is optimized, which decreases the temperature from 100 °C to 85 °C. Testing of bonding strength shows an average failure pressure of 1.75 MPa, which is comparable to the bonding strength of 1.46 MPa for chips bonded at 100 °C without plasma modification. In order to demonstrate this bonding method, a PMMA microfluidic chip with integrated copper interdigitated microelectrode arrays for AC electroosmotic pump is fabricated.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators B: Chemical - Volume 141, Issue 2, 7 September 2009, Pages 646–651
نویسندگان
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