Using ZnO nanorods to enhance sensitivity of liquid sensor

A novel application of ZnO nanorod arrays to enhance sensitivity of Love wave liquid sensor will be presented. The high sensitivity of Love wave liquid sensor used guiding layer with ZnO nanorod arrays and 90° rotated ST-cut quartz substrate. Two-step thin film deposited process was applied to get the guiding layer with dense structure in the internal part and nanorod arrays on the surface. Densely crystalline structure of ZnO thin film was deposited by radio frequency magnetron sputtering and ZnO nanorod arrays were synthesized on the thin film by hydrothermal method. The crystalline structure and surface morphology of films were examined by X-ray diffraction and scanning electron microscopy. The sensitivity of Love wave liquid sensor will be enhanced greatly by the guiding layer with nanorod arrays.