Hydrogen sensor prepared using fast proton-conducting glass films

Solid-state potentiometric thin film hydrogen gas sensors were successfully prepared using high proton-conducting P2O5-SiO2 glass films. A sol-gel method was used to deposit the glass films with conductivity of ∼10 mS/cm at room temperature. Platinum and manganese oxide thin films, deposited on the both side of the glass film, were used for the reference electrodes and the electromotive force (EMF) was measured between the electrodes. The EMF was linearly changed with the hydrogen concentration ranging from 0.1% to 4% in air or argon gas. Fast time response within ∼10 s was obtained at 30 °C. It was also confirmed that the sensor exhibited high sensibility at low temperature such as −30 °C.