کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
749761 894848 2008 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Thermal correction values for analysis of lineshape microstructure arrays
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Thermal correction values for analysis of lineshape microstructure arrays
چکیده انگلیسی

Thermal modeling of microelectromechanical systems is a major area of research with many different approaches and complexities. In this paper a simplified, reduced order model for thermal analysis of lineshape microstructure arrays, such as those used in thermal actuators, is explained. Finite element modeling of these arrays was performed to determine thermal correction (Kt) values for the simplified thermal model. An equation is developed to describe a general MEMS design space of the independent parameters for implementation of the simplified model. Error in the equation fit is quantified and the fit is validated. Application of the model is also shown for single microstructures. Implementation of the simplified model using a finite difference model is presented and validated, with errors in predicted temperature rise of less than 5.4%.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 148, Issue 1, 4 November 2008, Pages 168–175
نویسندگان
, ,