Ozone sensors based on SnO2 films modified by SnO2–Au nanocomposites synthesized by the SILD method

We consider the influence of surface modification by SnO2–Au nanocomposites on the conductivity response of SnO2 films to ozone. SnO2–Au nanocomposites with an Au/Sn ratio ∼1 were synthesized by the Successive Ionic Layer Deposition (SILD) method. The thickness of the Au–SnO2 nanocomposites deposited on the surface of the SnO2 films was controlled through a change of the number of deposition cycles. It was established that the indicated modification promotes optimization of sensor parameters. It was shown that sensors with a modified surface had a higher sensitivity to ozone and a shorter recovery time. An explanation of the observed effects is given.