کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
751558 895242 2007 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Structural properties and sensing characteristics of Y2O3 sensing membrane for pH-ISFET
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی آنالیزی یا شیمی تجزیه
پیش نمایش صفحه اول مقاله
Structural properties and sensing characteristics of Y2O3 sensing membrane for pH-ISFET
چکیده انگلیسی

The structural properties and sensing characteristics of Y2O3 sensing membrane were deposited on silicon substrates by reactive rf sputtering. The structural and morphological features of these films with annealing at various temperatures were studied by X-ray diffraction, atomic force microscopy, and X-ray photoelectron spectroscopy. It was found that Y2O3 sensing dielectrics annealed at 800 °C exhibit a high sensitivity of 56.09 mV/pH in the solutions from pH 2 to pH 12, a low hysteresis voltage of 13.6 mV in the pH 7 → 4 → 7 → 10 → 7, and a small drift rate of 1.24 mV/h in the pH 7 buffer solution. This annealing condition is suggested for the reduction of the interfacial SiO2 and silicate formation, and the small surface roughness due to the well-crystallized Y2O3 structure.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators B: Chemical - Volume 127, Issue 2, 15 November 2007, Pages 480–485
نویسندگان
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