WO3 sensor response according to operating temperature: Experiment and modeling

WO3-based sensors are realized in the aim to detect ozone. The thin film of WO3 is sputtered on a SiO2/Si substrate with Pt micro-electrodes. In a previous work, the sensor response dependence on processing parameters has been studied. Now operating temperature of the sensor is investigated and a theoretical model developed by our team confirms experimental measurements.The interaction between the gas and the surface was modeled by Langmuir isotherm and the electrical resistivity was evaluated by solving the transport equations.