Building energy saving performance indices for cleaner semiconductor manufacturing and an empirical study

Semiconductor industry is both technology and energy intense; therefore, using effective ways to reach energy saving goal has become an important issue. This study aims to establish a Fab energy efficiency assessment model for the semiconductor industry based on SMART decision analysis structure, which used multiple energy saving methods to measure energy cost management efficiency, and considered both theoretical and practical conditions to give suggestions to each indicator to improve the decision making on energy expenditure and distribution. In addition, this study took a Fab in Taiwan as an example to demonstrate the inspection of energy efficiency and construct OPE (Overall Power Energy Effectiveness) indicators, which can help managers to understand the execution of each decision-making unit and properly deploy the resource. The results showed that a Fab must additionally evaluate the energy saving design in expansion and concretely explain energy saving effect and energy management, analyzed the encountered energy difficulties and solutions in 8-inch Fab system, provided a reference for future expansion. The results demonstrated the practical viability of this approach.