Monitoring of organic contamination in the ambient air of microelectronic clean room by proton-transfer reaction/time-of-flight/mass spectrometry (PTR-ToF-MS)

Monitoring of organic contamination in the ambient air of microelectronic clean room by proton-transfer reaction/time-of-flight/mass spectrometry (PTR-ToF-MS)

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: International Journal of Mass Spectrometry - Volume 392, 3 December 2015, Pages 102-110

Nathalie Hayeck, Brice Temime-Roussel, Sasho Gligorovski, Aurélie Mizzi, Rachel Gemayel, Sabrine Tlili, Philippe Maillot, Nicolas Pic, Thomas Vitrani, Irène Poulet, Henri Wortham,