Correction of dead time effects in laser-induced desorption time-of-flight mass spectrometry: Applications in atom probe tomography

- Dead time effects in TOF-SIMS can be corrected for using Poisson statistics.
- Laser-induced desorption makes proper dead time correction much more challenging.
- We propose dead time correction using correlated events from different isotopes.
- To avoid interference from hydride peaks, doubly charged ion signals can be used.
- This delivered meaningful isotope ratios for atom probe tomography data of C and Si.