Heteroleptic titanium alkoxides as single-source precursors for MOCVD of micro-structured TiO2

Heterolepetic titanium alkoxides with donor-functionalized ligands show greatly modified behaviour as precursors for MOCVD of TiO2 compared with their homoleptic analogues with monodentate ligands. [Ti(OPri)2(OCH2CH2NMe2)2] is found to be a highly effective single-source precursor for MOCVD of micro structured anatase.