Modelling of the micro-channelling process on glasses using an abrasive slurry jet

A study of the micro-channelling process on a brittle amorphous glass using an abrasive slurry jet is presented. The mechanisms of the micro-channel formation process are discussed first, followed by the development of predictive models for material removal rate and the dimensions of the micro-channels produced. The models account for a variety of slurry and target material properties as well as other process parameters and have been verified by an experimental study. It is shown that the model predictions are in good agreement with the experimental data.

► There is a significant lack of understanding of the material removal process and mechanisms in abrasive waterjet micromachining.
► We present a study of the material removal mechanisms in abrasive waterjet micro-channelling of glasses.
► We develop mathematical models for the major micro-channelling performance measures.
► This paper also contains a design of an abrasive slurry jet technology used in this study.