Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications

Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 459, 30 November 2018, Pages 596-605

Seungmin Yeo, Dip K. Nandi, R. Rahul, Tae Hyun Kim, Bonggeun Shong, Yujin Jang, Jong-Seong Bae, Jeong Woo Han, Soo-Hyun Kim, Hyungjun Kim,