Low temperature growth of polycrystalline InN films on non-crystalline substrates by plasma-enhanced atomic layer deposition

Low temperature growth of polycrystalline InN films on non-crystalline substrates by plasma-enhanced atomic layer deposition

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 459, 30 November 2018, Pages 830-834

Hong Peng, Xingcan Feng, Jinhui Gong, Wei Wang, Hu Liu, Zhijue Quan, Shuan Pan, Li Wang,