Simple and low-cost nanofabrication process of nanoimprint templates for high-quality master gratings: Friction-induced selective etching

Simple and low-cost nanofabrication process of nanoimprint templates for high-quality master gratings: Friction-induced selective etching

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 454, 1 October 2018, Pages 23-29

Hongbo Wang, Bingjun Yu, Shulan Jiang, Cheng Chen, Linmao Qian,