The effects of phase transformation on the structure and mechanical properties of TiSiCN nanocomposite coatings deposited by PECVD method

The effects of phase transformation on the structure and mechanical properties of TiSiCN nanocomposite coatings deposited by PECVD method

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 444, 30 June 2018, Pages 377-386

Mohammad Abedi, Amir Abdollah-zadeh, Massimiliano Bestetti, Antonello Vicenzo, Andrea Serafini, Farid Movassagh-Alanagh,