Growth (AlCrNbSiTiV)N thin films on the interrupted turning and properties using DCMS and HIPIMS system

Growth (AlCrNbSiTiV)N thin films on the interrupted turning and properties using DCMS and HIPIMS system

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 440, 15 May 2018, Pages 1-7

Kai-Sheng Chang, Kuan-Ta Chen, Chun-Yao Hsu, Po-Da Hong,