کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7835262 | 1503532 | 2018 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication of hexagonal star-shaped and ring-shaped patterns arrays by Mie resonance sphere-lens-lithography
ترجمه فارسی عنوان
ساخت زنجیرهای الگوهای شش ضلعی ستاره ای و شکل حلقه ای توسط کریستال مسی رزیستنس لنز لیتوگرافی
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کلمات کلیدی
لنز کراس، لیتوگرافی، رزونانس م نانوپانتری سطحی، بلور لاتکس، دخالت،
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
چکیده انگلیسی
Mie resonance sphere-lens-lithography has proved to be a good candidate for fabrication of large-area tunable surface nanopattern arrays. Different patterns on photoresist surface are obtained theoretically by adjusting optical coupling among neighboring spheres with different gap sizes. The effect of light reflection from the substrate on the pattern produced on the photoresist with a thin thickness is also discussed. Sub-micron hexagonal star-shaped and ring-shaped patterns arrays are achieved with close-packed spheres arrays and spheres arrays with big gaps, respectively. Changing of star-shaped vertices is induced by different polarization of illumination. Experimental results agree well with the simulation. By using smaller resonance spheres, sub-400â¯nm star-shaped and ring-shaped patterns can be realized. These tunable patterns are different from results of previous reports and have enriched pattern morphology fabricated by sphere-lens-lithography, which can find application in biosensor and optic devices.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 440, 15 May 2018, Pages 378-385
Journal: Applied Surface Science - Volume 440, 15 May 2018, Pages 378-385
نویسندگان
Xianchao Liu, Jun Wang, Ling Li, Jun Gou, Jie Zheng, Zehua Huang, Rui Pan,