Vibrations of microscale circular plates induced by ultra-fast lasers

In this study, the vibration phenomena during pulsed laser heating of a microscale circular plate are investigated. The circular plate is made of silicon and is heated uniformly on the upper surface by a non-Gaussian laser beam with a pulse duration of 2 ps, which incites vibration due to the thermoelastic coupling effect. The coupling between the temperature field and stress field induces energy dissipation and converts mechanical energy into heat energy, which is irreversible. An analytical–numerical technique based on the Laplace transform is utilized to calculate the vibration of the deflection and thermal moment. The size effect is analyzed. Finally, the vibration behaviors of the circular plate under different environmental temperatures are compared.