Cluster-surface interaction: From soft landing to implantation

► We present a review in the field of interaction of atomic and molecular clusters with solids. ► We focus on clusters produced in the gas phase. ► We show how the physics of the cluster-matter interaction depends on the kinetic energy. ► Different interaction regimes are discussed: cluster deposition, sputtering and implantation. ► Use of cluster beams for various practical applications is overviewed.