Investigation of surface characteristics evolution and laser damage performance of fused silica during ion-beam sputtering

Surface characteristics have great influence on the optical properties especially the laser radiation resistivity of optics. In this paper, the surface characteristics evolutions of fused silica during ion-beam sputtering and their effects on the laser damage performance were investigated. The results show that roughness change is strongly removal depth dependent and a super-smooth surface (0.25 nm RMS) can be obtained by the ion-induced smoothing effect. The concentration of metal impurities (especially Ce element) in subsurface can be effectively decreased after the removal of polishing re-deposition layer. During ion-beam sputtering process, the plastic scratches can be removed while the brittle cracks can be broadened and passivated without increase in the depth direction. Laser damage threshold of fused silica improved by 36% after ion-beam sputtering treatment. Research results have a guiding significance for ion-beam sputtering process technology of fused silica optics.