Development of Y3+ and Mg2+-doped zirconia thick film humidity sensors

▶ Y3+ doped and Mg2+ doped zirconia thick film humidity sensors were developed. ▶ The sensors exhibited high sensitivity, good linearity and small hysteresis. ▶ Rapid response-recovery behavior and less effect of temperature were also exhibited. ▶ The influence of dopant on the sensors was discussed by XRD, XPS and defect structure. ▶ The humidity sensing mechanism is investigated.