Influence of O2 partial pressure on the growth of nanostructured anatase phase TiO2 thin films prepared by DC reactive magnetron sputtering

▶ Growth of crystalline anatase TiO2 can be controlled by % O2 and sputtering power. ▶ Agglomeration of TiO2 nano-sized grains is observed and rises with decrease in % O2. ▶ Nano-sized grains promote the formation of porous TiO2 films. ▶ Deposition parameters have great influence on the optical properties of TiO2 films.