Free-standing planar thermoelectric microrefrigerators based on nano-grained SiGe thin films for on-chip refrigeration

The single- and two-stage free-standing planar thermoelectric microrefrigerators based on nano-grained SiGe thin films have been developed for on-chip refrigeration. The free-standing design that completely eliminates the parasitic heat loss, improved metal contact, and the IC-compatible SiGe films with nanograin-enhanced thermoelectric properties lead to high cooling performance and excellent compatibility for on-chip integration.263