Nano-patterning of surfaces by ion sputtering: Numerical study of the anisotropic damped Kuramoto-Sivashinsky equation

Nano-patterning of a surface presenting a preexisting atomic profile through ionic bombardment. The nonlinearities of the anisotropic damped Kuramoto-Sivastinsky lead to the emergence of hexagonal modes, quickly dominating the system. Realistic coefficients are employed, and the observed patterns match experimental results in sputtering.302