کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
796200 902796 2009 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Low temperature processing of high conductivity and high transparency indium–tin-oxide/Ag alloy/indium–tin-oxide multilayered thin films
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی صنعتی و تولید
پیش نمایش صفحه اول مقاله
Low temperature processing of high conductivity and high transparency indium–tin-oxide/Ag alloy/indium–tin-oxide multilayered thin films
چکیده انگلیسی

Indium–tin-oxide (ITO) thin films and ITO/Ag alloy/ITO multilayered thin films were deposited on glass substrates using a vertical in-line multilayer sputtering system. Ceramic ITO targets were used for the deposition of ITO layers at low substrate temperature of 100 °C. It was observed that the sheet resistance and light transmission of ITO films were affected by the oxygen pressure significantly. The ITO/Ag alloy/ITO multilayered thin films made in the present work had a low sheet resistance (6.9 Ω/□) and a high transmission (87.1%) at 550 nm. Atomic force microscopy (AFM) investigation showed that through selecting proper processing parameters, the surface roughness could be significantly reduced. The surfaces of ITO films were found very smooth by using pulsed-direct current (pulsed-dc) sputtering with introduction of H2O. The work functions of the ITO films and ITO/Ag alloy/ITO multilayered films were increased with oxygen plasma treatment.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Materials Processing Technology - Volume 209, Issue 2, 19 January 2009, Pages 973–977
نویسندگان
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