Compositional and structural analysis of RF magnetron sputtered La3+-modified PZT thin films

In the present work, we report the preparation of lanthanum-modified lead zirconate titanate (PLZT) thin films in pure perovskite phase by RF magnetron sputtering. For this purpose, a 3-in. diameter target of PLZT (8/60/40) was prepared by conventional solid-state reaction route. The chemical composition of PLZT target was determined using gravimetric analysis followed by UV–vis and flame atomic absorption spectrometry. Various deposition parameters such as target-to-substrate spacing, deposition temperature, post-deposition annealing temperature and time have been optimized to obtain PLZT films in pure perovskite phase. The films prepared in pure argon at 100 W RF power without external substrate heating exhibited pure perovskite phase after rapid thermal annealing (RTA) as confirmed by X-ray diffraction (XRD). Compositional analysis of the PLZT film was performed by secondary ion mass spectroscopy (SIMS) using PLZT target as standard sample. Depth profile of the film shows very good stoichiometric uniformity of all elements of PLZT.