Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis

► AlN and TiN layers are always in tension and compression at interface, respectively. ► Curvature of the bending is largest for the TiN/AlN thickness ratios ∼0.5 and ∼2. ► Curvature is maximum for equal number of TiN and AlN layers in multilayer film. ► Curvature is decreases with increasing the no. of TiN/AlN periods in multilayer film. ► Top layer and sample geometry plays critical role on the coherency stress profile.