کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
801912 1467698 2007 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Thermoelastic coupled modeling for a thermal bimorph actuator
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی مکانیک
پیش نمایش صفحه اول مقاله
Thermoelastic coupled modeling for a thermal bimorph actuator
چکیده انگلیسی

This paper presents a theoretical thermoelastic coupled model for a thermal bimorph actuator driven by a harmonically varying thermal load in micro-electro-mechanical systems. The thermoelastic coupling, which arises from the coupling of the strain rate to the temperature field of the heat transport, is considered in this model. The frequency responses are simulated using the theorem of eigenmode expansion. The effects of thermoelastic coupling on the resonant frequency and the quality factor Q for each eigenmode resonance of the deflection are calculated and compared with the same effects resulted from air damping. It shows that for the example of an aluminum–polysilicon thermal bimorph actuator, the resonant frequencies are generally shifted downward with the order larger than that of air damping, whereas the influence of thermoelastic coupling on the Q is more significant than that of air damping under high vacuum level.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Mechanics Research Communications - Volume 34, Issues 7–8, October–December 2007, Pages 553–560
نویسندگان
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