A new model analysis approach for bridge-type amplifiers supporting nano-stage design

• A more accurate analysis method for bridge-type amplifiers is proposed.
• The effect of external loads is considered in the modeling process.
• The method is applied to modeling a bridge-type-amplifier based nano-stage.
• The method offers a new look into the analysis and design of compliant mechanisms.

This paper presents a new analysis method for bridge-type amplifiers by incorporating the effect of external loads, and establishes a theoretical model to predict the input/output displacement amplification ratio based on elastic beam theory. The new analytical model indicates that the displacement amplification ratio of the bridge-type amplifiers decreases significantly in the presence of external loads, and its changing rate increases with higher external loads. The analysis method is then applied to the modeling and design of a bridge-type-amplifier based nano-manipulating stage, where the guiding mechanism acts as the external load of the bridge-type amplifiers. It is shown that the new analysis method can derive more accurate model of the nano-stage, which is further verified by the finite element analysis (FEA) results. The proposed method offers a new look into the analysis and design of flexure based nano-stages for real applications.