کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
802296 1467764 2013 16 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Design, testing and precision control of a novel long-stroke flexure micropositioning system
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی صنعتی و تولید
پیش نمایش صفحه اول مقاله
Design, testing and precision control of a novel long-stroke flexure micropositioning system
چکیده انگلیسی


• A micropositioning stage with both long stroke and compact size is devised.
• A new discrete-time sliding mode control algorithm is proposed.
• Stage parameter optimization and structure improvement are performed.
• Finite-element analysis and experimental studies are carried out.
• A submicron resolution over 11 mm stroke is achieved.

This paper presents the design, modeling, analysis, testing and control of a novel compact long-stroke precision positioning stage. The stage is devised with leaf flexures to achieve a submicron-accuracy positioning with a stroke longer than 10 mm. Stage architectural parameters are designed to achieve the maximum natural frequency and then further improved to ensure a robust motion along the working axis. A voice coil motor and a laser displacement sensor are adopted for actuation and sensing of the fabricated stage, respectively. Both finite-element analysis and experimental tests confirm a motion range over 11 mm. To facilitate a rapid and precise positioning in front of nonlinear effects, a discrete-time sliding mode control (DSMC) algorithm based on a proportional–integral-derivative (PID) type of sliding function is devised. The DSMC guarantees the stability of the system in the presence of model uncertainties and disturbances. The effectiveness of the presented DSMC is verified through experimental studies. Results show that the DSMC is superior to PID algorithm in terms of both transient response speed and steady-state accuracy.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Mechanism and Machine Theory - Volume 70, December 2013, Pages 209–224
نویسندگان
,