کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8039260 | 1518603 | 2018 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Reduction of the divergence angle of an incident beam to enhance the demagnification factor of a two-stage acceleration lens in a gas ion nanobeam system of several tens of keV
ترجمه فارسی عنوان
کاهش زاویه واگرایی یک پرتو حادثه به منظور افزایش فاکتور تخریب یک لنز شتاب دو مرحله ای در یک سیستم نانوایی یونی گاز چند ده کیلو وات
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کلمات کلیدی
لنز شتاب دو مرحله ای، گاز نانو بنزین یون، عامل تخریب بالا، زاویه واگرایی کوچک
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
چکیده انگلیسی
The demagnification factor of a two-stage acceleration lens in a gas ion nanobeam system that produces ion beams with energies in the order of 10â¯keV was enhanced in this study so that a hydrogen ion beam with a diameter of 115â¯nm could be produced. The reduction of the divergence angle of the incident beam into the two-stage acceleration lens is the effective method for enhancing the demagnification factor. The divergence angle has been gradually reduced by firstly introducing the preacceleration electrodes to control the divergence angle, namely divergence-angle-control electrodes, and secondly replacing an anode with a modified anode that possesses a Pierce electrode, both of which were in an ion source directly connected to the lens. In this study, the divergence angle of less than 3.6â¯Ãâ¯10â4 rad that was previously used to produce a 160-nm hydrogen ion beam with the energy of 46â¯keV by the above procedure was numerically determined using an ion beam extraction simulation code. The determined minimum divergence angle of the incident ion beam was calculated to be 2.0â¯Ãâ¯10â4 rad, which was about half of the previously obtained divergence angle; this was used to experimentally form a hydrogen beam with a diameter of 115â¯Â±â¯10â¯nm and the energy of 47â¯keV. The demagnification factor was estimated to be 1,739 using the newly formed hydrogen beam, which was similar to the simulation result.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 420, 1 April 2018, Pages 12-17
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 420, 1 April 2018, Pages 12-17
نویسندگان
Yasuyuki Ishii, Takuji Kojima,