کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
803938 904806 2013 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Random error analysis of profile measurement of large aspheric optical surface using scanning deflectometry with rotation stage
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی صنعتی و تولید
پیش نمایش صفحه اول مقاله
Random error analysis of profile measurement of large aspheric optical surface using scanning deflectometry with rotation stage
چکیده انگلیسی

Scanning deflectometry method has been successfully employed for the measurements of large flat surfaces with sub-nanometer uncertainty. In this paper, we propose an alternative scanning deflectometry method for measuring large aspheric optical surfaces, wherein a rotation stage is incorporated to increase the measurement range of the high-accuracy autocollimators used to measure small angles. Further, the pitching error of the linear stage is compensated with offline measurement data. In this study, we conducted random error analysis to estimate the measurement repeatability. Our results show that for the measurements of large aspheric surfaces with large slope changes, 10-nm repeatability is achievable under the suitable conditions. To verify the random error analysis results, we also constructed an experimental setup for test the measurement repeatability. The repeatability distribution of the experimental results was in good agreement with the error analysis distribution. We have thus demonstrated the applicability of the random error analysis in the measurement of large aspheric surfaces with high accuracies.


► We propose improved large aspheric optical surface measurement method.
► We make random analysis for the proposed method.
► We build experiment setup and conduct measurement experiment.
► We verify the error analysis result by comparing with the experiment result.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Precision Engineering - Volume 37, Issue 3, July 2013, Pages 599–605
نویسندگان
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