کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
8039537 1518612 2017 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Biological and material science applications of EUV and SXR nanoscale imaging systems based on double stream gas puff target laser plasma sources
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Biological and material science applications of EUV and SXR nanoscale imaging systems based on double stream gas puff target laser plasma sources
چکیده انگلیسی
In this paper we present our recent results related to nanoscale imaging using such table-top and desk-top EUV/SXR microscopes. Their construction is based on a double stream gas puff target laser plasma source. The double stream gas puff target EUV and SXR sources, coupled with Fresnel zone plates (FZPs) represent a suitable platform for microscopy experiments in transmission mode, employing SXR and EUV radiation. It represents a possible complementary technique to synchrotrons and free-electron laser facilities. The sources, which are very easy to be used by a single user, allow for efficient generation of plasma radiation with high SXR/EUV flux. Presented herein compact microscopes, based on that source, allow one to capture SXR and EUV images of various samples, with 50-60 nm half-pitch spatial resolution (corresponding to a Rayleigh resolution of 100-120 nm) and exposure time of the order of few seconds. Thus, herein, we would like to present our recent developments and progress in compact desk-top SXR/EUV microscopy employing laser plasma gas puff target sources, showing examples of acquired images and possible applications.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 411, 15 November 2017, Pages 29-34
نویسندگان
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