کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
8040062 1518658 2015 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Effects of faceted surface topography on high-fluence sputtering of graphite
ترجمه فارسی عنوان
اثر توپوگرافی سطح فشرده شده بر روی اسپری شدن گرافیت بالا
کلمات کلیدی
بمباران یون لکه های سطحی، تسکین ناشی از یون، گرافیت، شبیه سازی رایانهای،
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
چکیده انگلیسی
Effects of ion-induced faceted surface relief on high-fluence sputtering of graphite under 30-keV Ar and 15-keV N ion bombardment have been studied by means of binary-collision computer simulation. Taking into account experimental observations of surface topography, the relief was modeled by an α-dependent ridge-like periodic function (α = the ion incidence angle measured from the normal to macroscopic surface plane). It was shown that for normal incidence the sputter yield S represents a non-monotonic function of the relief aspect ratio and is saturated at x ∼ 100-200 nm (x = the half-period of the relief). The simulations stressed the importance of the relationship between the dimensions of surface roughness and atomic collision cascades and allowed to explain the S(α)-dependences found experimentally. It was shown that a strong (about 2 times) decrease of S at α = 60-80° is due to a shadowing mechanism which is also clearly revealed in the angular distribution of sputtered atoms.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 362, 1 November 2015, Pages 57-61
نویسندگان
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