کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8040062 | 1518658 | 2015 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effects of faceted surface topography on high-fluence sputtering of graphite
ترجمه فارسی عنوان
اثر توپوگرافی سطح فشرده شده بر روی اسپری شدن گرافیت بالا
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کلمات کلیدی
بمباران یون لکه های سطحی، تسکین ناشی از یون، گرافیت، شبیه سازی رایانهای،
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
چکیده انگلیسی
Effects of ion-induced faceted surface relief on high-fluence sputtering of graphite under 30-keV Ar and 15-keV N ion bombardment have been studied by means of binary-collision computer simulation. Taking into account experimental observations of surface topography, the relief was modeled by an α-dependent ridge-like periodic function (α = the ion incidence angle measured from the normal to macroscopic surface plane). It was shown that for normal incidence the sputter yield S represents a non-monotonic function of the relief aspect ratio and is saturated at x â¼Â 100-200 nm (x = the half-period of the relief). The simulations stressed the importance of the relationship between the dimensions of surface roughness and atomic collision cascades and allowed to explain the S(α)-dependences found experimentally. It was shown that a strong (about 2 times) decrease of S at α = 60-80° is due to a shadowing mechanism which is also clearly revealed in the angular distribution of sputtered atoms.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 362, 1 November 2015, Pages 57-61
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 362, 1 November 2015, Pages 57-61
نویسندگان
V.I. Shulga,