Energy spectra of Ar ions scattered on Al and Ge surfaces

The paper presents a model for calculating atom scattering from a polycrystalline target and results of energy spectra measurements of Аr+ ions scattered from Al and Ge surfaces. It has been shown that allowance for multiple scattering at glancing angles α = 8 ÷ 22° affects the magnitude of inelastic energy loss determined from the position of the single scattering peak. A formula describing the inelastic energy loss dependence on the distance of closest approach of colliding atoms has been proposed. It has been shown that the comparison of experimental and calculated peak/background ratios in energy spectra for scattering from both the polycrystalline and amorphous targets allows us to estimate the surface structure.