کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8040936 | 1518665 | 2015 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A compact high-resolution elastic recoil detection system for lithium depth profiling
ترجمه فارسی عنوان
یک سیستم تشخیصی کشش کششی با وضوح با وضوح بالا برای پروفیل عمق لیتیوم
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
چکیده انگلیسی
A compact high-resolution elastic recoil detection analysis (ERDA) system was developed for precise Li analysis. 200-400Â keV He+ ions were used as primary ions and the energy spectra of recoiled Li ions were measured using a magnetic spectrometer. Due to its dispersion the background originating from the scattered primary ions is reduced. The recoiled ions of the substrate other than Li, which may also contribute to the background, were rejected by a thin mylar foil placed in front of a focal plane detector. An electrostatic quadrupole lens was installed at the entrance of the magnetic spectrometer to improve the depth resolution by correcting the effect of the kinematic broadening. The performance of the developed high-resolution ERDA was examined by measuring several samples. A thin Li layer (1.5Â ÃÂ 1015Â cmâ2) deposited on a graphite surface was clearly observed and the detection limit was estimated to be less than 0.01Â ML under typical measurement conditions. The depth resolution was estimated to be 0.5Â nm at the surface and was better than 3Â nm in the surface region within 5Â nm from the surface.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 354, 1 July 2015, Pages 240-243
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 354, 1 July 2015, Pages 240-243
نویسندگان
Masataka Nikko, Kaoru Nakajima, Kenji Kimura,