PIXE, SR-XRD and EXAFS analysis of Cu-doped ZnO films

Cu-doped ZnO films were prepared by rf magnetron sputtering on sapphire substrate at different atmosphere. Microstructure of these films and Cu occupation sites were investigated using PIXE, SR-XRD and EXAFS. Only 2.9 at.% Cu, no other magnetic impurities (e.g., Fe, Co and Ni) were detected. The ZnO:Cu films possessed the wurtzite ZnO structures and no precipitates (e.g., CuO and Cu2O or Cu cluster) were found. Cu atoms were incorporated into ZnO crystal lattice by occupying Zn atomic sites.