کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8041850 | 1518691 | 2014 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Exploring cryogenic focused ion beam milling as a Group III-V device fabrication tool
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
In this paper, we compare the features observed on a Group III-V strained layer superlattice (SLS) materials system as a result of room temperature Ga+ focused ion beam (FIB) milling to the features observed as a result of cryogenic FIB (cryo-FIB) milling at -135 °C under the same beam conditions (30 kV:1 nA). The features on the cryo-FIB milled material were observed both when the material was still cold and after it returned to room temperature. Although cryo-FIB milling yielded patterned features that were initially cleaner than comparable features defined by FIB milling at room temperature, we found that both room temperature FIB milling and cryo-FIB milling with subsequent sample warm-up resulted in the formation of Group III enriched features. These findings suggest that the structural and chemical properties of features fabricated by cryo-FIB milling are temperature-dependent, which is an important consideration when it comes to device fabrication. These dependencies will need to be better understood and controlled if cryo-FIB milling is to have future applications in this area.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 328, 1 June 2014, Pages 33-41
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 328, 1 June 2014, Pages 33-41
نویسندگان
Melissa Commisso Dolph, Christopher Santeufemio,