Magnetron-like miniature ion source

This paper describes a new type of a miniature ion source (about 0.05 cm3), partially based on the construction of a magnetron but made with the use of the MEMS (Micro-Electro-Mechanical System) technology. Two configurations of the device have been tested: two-electrode, working in low vacuum (from 70 to 0.02 hPa) and three-electrode, operating in a wide range of pressure (from 70 to 10−5 hPa). The gas ionization process takes place only for certain electrode spacings and proper electrodes polarization. For optimal geometry and supply conditions electrons are “trapped” and circulate inside the microdevice, which increases the probability of their collisions with gas particles even in high vacuum. The three-electrode ion source can by further use as a part of a miniature mass spectrometer as well as an ion-sorption micropump or pressure microgauge.