Thermal desorption behaviors of helium in Zr-Co films prepared by sputtering deposition method

The amorphous ZrCo films on Mo substrates with different 4He content were prepared through direct current (DC) magnetron sputtering deposition method. The atomic compositions of Zr, Co and He in Zr-Co films were measured using Rutherford backscattering (RBS) and elastic recoil detection analysis (ERDA), respectively. The helium desorption behaviors in the films were investigated. Microstructural changes during THDS measurement were analyzed with grazing incidence X-ray diffraction (GIXRD). It was found that ZrCo2 phase, an important disproportionation product in ZrCo hydriding-dehydriding process, was formed during the THDS experiment in a rising temperature range of 300 K-1323 K. The helium desorption signals can be evidently divided into three main zones and represent different trapping states. Synchronous desorption of hydrogen and helium was observed.