کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8045136 | 1518968 | 2014 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Radio-frequency magnetized ring-shaped hollow cathode discharge plasma for low-pressure plasma processing
ترجمه فارسی عنوان
پلاسما برای تخلیه پالس توخالی کادو حلقوی مغناطیسی رادیویی برای پردازش پلاسمای کم فشار
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
چکیده انگلیسی
Influence of magnetic field configuration on ring-shaped hollow cathode discharge has been investigated in order to perform high-density plasma sources under a low gas pressure of a few tens mTorr. Three typed arrangements of permanent magnets such as (a) NS-NS, (b) NS-SN and (c) NS are examined. The NS-NS arrangement has a divergent profile with a peak in axial direction in hollow cathode. The NS-SN placement forms a cusp profile with a mirror configuration in axial direction. In final, the NS setup assigns a conventional divergent field. For the cases of (a) NS-NS and (b) NS-SN arrangements, their plasma density keeps a higher order of magnitude of 1011Â cmâ3 at the wide range of gas pressure of 10-200Â mTorr. On the other hand, the NS arrangement maintains only the order of magnitude of 1011Â cmâ3 at the region of gas pressure more than 30Â mTorr. All radial profiles of plasma density near the hollow cathode show non-uniformity like M-shaped distribution. However, it is found that the uniformity of their radial profiles depends on the arrangement of permanent magnets.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 101, March 2014, Pages 46-52
Journal: Vacuum - Volume 101, March 2014, Pages 46-52
نویسندگان
Yasunori Ohtsu, Junta Eguchi, Yoshiki Yahata,