The work of ISO TC 112 towards standardization for specification and calibration of quadrupole mass spectrometers

Absolute quantitative measurements of partial pressures with quadrupole mass spectrometers in industry have become increasingly important in the past decade. On the other hand, there is no broadly accepted method to calibrate quadrupole mass spectrometers and partial pressure measurements are not traceable to the SI. For this reason the ISO Technical Committee 112 for vacuum technology is taking steps to improve this situation by standardization.