Silica nanofibers based impedance type humidity detector prepared on glass substrate

► Fabrication of silica nanofibers using simple technique with average diameter of ∼150-200 nm while length is more than ∼100 μm. ► We investigate the contributions of dipoles, space charge polarization and the relaxation phenomenon in the dipole through impedance measurements. ► The presented humidity sensor reveals high sensitivity, quick response and rapid recovery time, good stability and reproducibility.