کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
804693 | 904978 | 2009 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Phase shifts and energy dissipations of several modes of AFM: Minimizing topography and dissipation measurement errors
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی صنعتی و تولید
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
For clear interpretation of a sample's surface properties, several simple and general relations between phase shifts of atomic force microscopy (AFM) and sample's properties are derived. The topography and dissipation measurement errors due to some inherent uncertainties are investigated. For derivation of these simple and general relations among measuring signals and sample's properties, the dynamic behavior of a cantilever is simulated into a mass-spring-damper model. In general, the conventional model can determine the first mode only. The dynamic effective spring theory is introduced here. Based on this theory, the conventional model can be modified to accurately determine the dynamic motions of higher modes of a cantilever. If the dynamic behavior is almost harmonic, the exact dynamic response of the general system subjected to arbitrary tip-sample force is derived. Moreover, several simple and general relations among dynamic responses of AFM and sample's properties are discovered. Based on these relations, the errors of measuring a sample's surface properties due to the inherent measuring uncertainties are investigated. Finally, some methods to minimize the error of measurement are proposed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Precision Engineering - Volume 33, Issue 4, October 2009, Pages 371-377
Journal: Precision Engineering - Volume 33, Issue 4, October 2009, Pages 371-377
نویسندگان
Shueei-Muh Lin, Cheng-Che Lin,