Tip radius effect of AFM probe on K4Nb6O17·3H2O nanosheets groove machining accuracy

This paper presents a technique for groove machining of potassium niobate nanosheets using an atomic force microscope (AFM). Groove machining operations are performed using super sharp silicon (SSS) probes. The tip radius of these probes is less than 5 nm and is one-third that of a conventional silicon (Si) probe. The results obtained using these probes are compared with those obtained using a Si probe, in order to examine the tip radius effects of the AFM probe on groove machining accuracy, i.e., coarseness of the machined groove. These results show that the degree of coarseness of the machined groove for varying machining loads with the SSS probe was much worse than that with the Si probe. Thus, groove machining with the SSS probe was more difficult to control with varying machining loads. We propose a groove fabrication model that considers the stochastic energy and difference in tip radius of the AFM probe. Using our groove fabrication model, changes in the coarseness of the machined groove for varying machining loads can be predicted.