Study on intelligent control system of two-dimensional platform based on ultra-precision positioning and large range

The aim of this paper is to improve the positioning accuracy of the micro-positioning stage constructed by flexure hinge and driven by piezoelectric devices. The micro-positioning stage is the micro-stage of an two-dimensional ultra-precision positioning system with high-speed and large range, which is a typical macro–micro-dual-drive system. Because of the strong nonlinearity of the micro-positioning stage, such as hysteresis and creep, and the influence of the highly accelerated operation of the macro-positioning stage, the traditional PID control cannot achieve good performance. To solve this problem, a PID position controlling system based on adaptive neural-fuzzy inference has been proposed and the structure of this control system is also analyzed. The experimental results show that the performance is effectively improved under the intelligent control method. The repetitive positioning accuracy is improved from 92 nm to 23 nm at the axis X and from 102 nm to 28 nm at the axis Y.