کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
805374 | 905138 | 2009 | 7 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: A flexure-based mechanism and control methodology for ultra-precision turning operation A flexure-based mechanism and control methodology for ultra-precision turning operation](/preview/png/805374.png)
This paper presents the methodology for modeling and control of a high precision flexure-based mechanism for ultra-precision turning operation. A high performance piezoelectric actuator is used to driven the flexure-based mechanism. A parallel flexure hinge mechanism is utilized to guide the moving platform and to preload the piezoelectric actuator. A high resolution capacitive sensor is used to measure the displacement of the flexure-based mechanism for closed-loop control. With consideration of the driving circuit, the dynamic model of the flexure-based mechanism has been established. The effect of the driving circuit on the dynamic response of the precision mechanism is investigated. Experimental tests have been carried out to verify the established model and the performance of the flexure-based mechanism.
Journal: Precision Engineering - Volume 33, Issue 2, April 2009, Pages 160–166