کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
805476 905149 2006 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Bench-top setup for validation of real time, digital periodic error correction
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی صنعتی و تولید
پیش نمایش صفحه اول مقاله
Bench-top setup for validation of real time, digital periodic error correction
چکیده انگلیسی

This paper provides experimental validation of the digital first-order periodic error reduction scheme described by Chu and Ray. A bench-top setup of a single-pass, heterodyne Michelson interferometer, designed to minimize common error contributors such as Abbe, dead path and environment, is described. Linear, reciprocating motion generation is achieved using a parallelogram, leaf-type flexure. Periodic error amplitude is varied through independent rotation of a half wave plate and polarizer. Experimental results demonstrate that the correction algorithm can successfully attenuate first-order error to sub-nm levels for a wide range of frequency mixing conditions.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Precision Engineering - Volume 30, Issue 3, July 2006, Pages 306–313
نویسندگان
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